68.55.-a Thin film structure and morphology (for Methods of thin film deposition, film growth and epitaxy, see 81.15) ( 0 Dok. )

• 68.55.Jk Structure and morphology; thickness ( 0 Dok. )
• 68.55.Ln Defects and impurities: doping, implantation, distribution, concentration, etc. (for diffusion of impurities, see 66.30) ( 0 Dok. )
• 68.55.Nq Composition and phase identification ( 0 Dok. )