81.65.-b Surface treatments (see also 85.40 microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology) ( 0 Dok. )

• 81.65.Cf Surface cleaning, etching, patterning ( 0 Dok. )
• 81.65.Kn Corrosion protection ( 0 Dok. )
• 81.65.Lp Surface hardening: nitridation, carburization, carbonitridation ( 0 Dok. )
• 81.65.Mq Oxidation ( 0 Dok. )
• 81.65.Ps Polishing ( 0 Dok. )
• 81.65.Rv Passivation ( 0 Dok. )
• 81.65.Tx Gettering ( 0 Dok. )