85.40.-e Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology (see also 85.45 vacuum microelectronics) Microwave integrated electronics, see 84.40.L Integrated optics, see 42.82 Superconducting microelectronic circuits, see 85.25.N ( 0 Dok. )

• 85.40.Bh Computer-aided design of microcircuits; layout and modeling ( 0 Dok. )
• 85.40.Hp Lithography, masks and pattern transfer Micromechanical devices and systems, see 07.10.C ( 0 Dok. )
• 85.40.Ls Metallization, contacts, interconnects; device isolation ( 0 Dok. )
• 85.40.Qx Microcircuit quality, noise, performance, and failure analysis ( 0 Dok. )
• 85.40.Ry Impurity doping, diffusion and ion implantation technology ( 0 Dok. )
• 85.40.Sz Deposition technology (for plasma applications in deposition technology, see 52.75.R) ( 0 Dok. )
• 85.40.Ux Nanometer-scale fabrication technologybipolar integrated circuits, see 85.30.P Field effect integrated circuits, see 85.30.T ( 0 Dok. )
• 85.40.Xx Hybrid microelectronics; thick films Nanophase materials, see 81.05.Y ( 0 Dok. )