This dissertation addresses the measurement and evaluation of the energy and resource efficiency of software systems. Studies show that the environmental impact of Information and Communications Technologies (ICT) is steadily increasing and is already estimated to be responsible for 3 % of the total greenhouse gas (GHG) emissions. Although it is the hardware that consumes natural resources and energy through its production, use, and disposal, software controls the hardware and therefore has a considerable influence on the used capacities. Accordingly, it should also be attributed a share of the environmental impact. To address this softwareinduced impact, the focus is on the continued development of a measurement and assessment model for energy and resource-efficient software. Furthermore, measurement and assessment methods from international research and practitioner communities were compared in order to develop a generic reference model for software resource and energy measurements. The next step was to derive a methodology and to define and operationalize criteria for evaluating and improving the environmental impact of software products. In addition, a key objective is to transfer the developed methodology and models to software systems that cause high consumption or offer optimization potential through economies of scale. These include, e. g., Cyber-Physical Systems (CPS) and mobile apps, as well as applications with high demands on computing power or data volumes, such as distributed systems and especially Artificial Intelligence (AI) systems. In particular, factors influencing the consumption of software along its life cycle are considered. These factors include the location (cloud, edge, embedded) where the computing and storage services are provided, the role of the stakeholders, application scenarios, the configuration of the systems, the used data, its representation and transmission, or the design of the software architecture. Based on existing literature and previous experiments, distinct use cases were selected that address these factors. Comparative use cases include the implementation of a scenario in different programming languages, using varying algorithms, libraries, data structures, protocols, model topologies, hardware and software setups, etc. From the selection, experimental scenarios were devised for the use cases to compare the methods to be analyzed. During their execution, the energy and resource consumption was measured, and the results were assessed. Subtracting baseline measurements of the hardware setup without the software running from the scenario measurements makes the software-induced consumption measurable and thus transparent. Comparing the scenario measurements with each other allows the identification of the more energyefficient setup for the use case and, in turn, the improvement/optimization of the system as a whole. The calculated metrics were then also structured as indicators in a criteria catalog. These indicators represent empirically determinable variables that provide information about a matter that cannot be measured directly, such as the environmental impact of the software. Together with verification criteria that must be complied with and confirmed by the producers of the software, this creates a model with which the comparability of software systems can be established. The gained knowledge from the experiments and assessments can then be used to forecast and optimize the energy and resource efficiency of software products. This enables developers, but also students, scientists and all other stakeholders involved in the life cycleof software, to continuously monitor and optimize the impact of their software on energy and resource consumption. The developed models, methods, and criteria were evaluated and validated by the scientific community at conferences and workshops. The central outcomes of this thesis, including a measurement reference model and the criteria catalog, were disseminated in academic journals. Furthermore, the transfer to society has been driven forward, e. g., through the publication of two book chapters, the development and presentation of exemplary best practices at developer conferences, collaboration with industry, and the establishment of the eco-label “Blue Angel” for resource and energy-efficient software products. In the long term, the objective is to effect a change in societal attitudes and ultimately to achieve significant resource savings through economies of scale by applying the methods in the development of software in general and AI systems in particular.